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Product Description
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SS Vapor Vacuum
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The Nilfisk SS Vapor Vacuum captures toxic semiconductor gases and ultrafine particulate. An impregnated carbon filter cartridge captures and retains such toxic gases as arsine,phosphine and chlorinated solvent vapors (carbon tetrachloride and chloroform) released during the cleaning of semiconductor process equipment such as molecular beam epitaxy (MBE) chambers, ion implanters and plasma etching machines.
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VT Mercury Vacuum Cleaner
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Specifically designed to safely collect and retain liquid mercury spills and granular compounds while eliminating toxic vapors, four stages of filtration allow the VT Mercury Vacuum to meet OSHA standards for inorganic mercury.
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SS Mercury Vacuum Cleaner
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The Nilfisk SS Mercury Vacuum recovers liquid mercury spills and granular mercury compounds effectively, while adsorbing mercury vapors in the process.
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