SS Vapor Vacuum

The Nilfisk SS Vapor Vacuum captures toxic semiconductor gases and ultrafine particulate. An impregnated carbon filter cartridge captures and retains such toxic gases as arsine, phosphine and chlorinated solvent vapors (carbon tetrachloride and chloroform) released during the cleaning of semiconductor process equipment such as molecular beam epitaxy (MBE) chambers, ion implanters and plasma etching machines.

Included Accessories
Disposable paper bags (5/pkg), specially impregnated carbon filter, positive twist safety latches, heavy-duty trolley assembly, container plug w/lanyard, wand end cap & microfilter

SS Vapor Vacuum
Voltage 120 / 220 V
Power 1.48 HP
Waterlift 82 in. H2O
Airflow 45 CFM
Current 10 / 5 amps
Container Capacity 3.25 gallons
Dimensions (L x W x H) 22.0 x 22.0 x 38.5 in.
Weight 65 lb.
Sound Pressure Level 61 dB(A)

SS Vacuum Product Sheet 905.23 KB 3759 downloads

    Instruction Manuals

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